Beneq

Website

www.beneq.com

Services

In app support

Home of ALD

Beneq stands as the global leader in atomic layer deposition (ALD) technology, having pioneered its industrial production since 1984. The company delivers advanced ALD equipment and comprehensive services tailored for both industrial applications and academic research. Its innovative solutions are critical for precision material manipulation at the nanoscale, addressing diverse needs across various high-technology sectors.

Beneq's extensive product portfolio includes specialized ALD systems designed for different production scales and research demands. This encompasses state-of-the-art equipment for semiconductor device fabrication, such as Transform®, Transform® 300, and ProdigyTM, optimized for high-capacity wafer production. For larger-scale and diverse substrate coating requirements, Beneq offers robust batch production systems like the P400A, P800, and P1500, which are ideal for depositing thick films. Furthermore, the company provides premium, highly flexible ALD research equipment, including TFS200, TFS500, and R2, dedicated to academic and corporate R&D. Its offerings also extend to ultra-fast spatial ALD (C2R) and roll-to-roll ALD (Genesis) systems for flexible substrates.

Beyond equipment provision, Beneq offers essential support services to its clientele. The unique Development Service facilitates customer adoption and proof-of-concept for novel ALD processes, while the Coating Service accelerates time-to-market by providing outsourced state-of-the-art ALD production. A dedicated team of engineers and experts ensures that ALD tools are accessible and effectively utilized by researchers and industrial partners globally, tackling complex interfacial engineering and device optimization challenges across various markets.

Locations

• Espoo, Uusimaa